Telecentric UV Laser Scanning Lenses

Special Optics Telecentric F-Theta UV Scanning lenses offer greater depth of field and smaller spot sizes when marking objects for laser material processing. Telecentric scanning lenses, by the very nature of their design, maintain a near normal incidence angle of the beam to the work piece. This ensures that position errors and image distortions are minimized over the entire scan range. With the shorter wavelength, a smaller spot size is achievable.

Having a greater depth of field and smaller spot size are important for precision laser micro-machining processes where there is a need to produce fine spot sizes so as to control the width of a laser mark, scribe or drilled hole while maintaining precise placement over a relatively large field. The ability to accomplish this is sometimes affected by minimal warping of a wafer or solar panel.

Special Optics Telecentric UV scanning lenses include focal lengths of 34mm, 50mm, and 100mm and are available for 266nm or 355nm wavelengths. The scan fields range from 9mm, 20mm, 45mm, and 55mm. Our telecentric UV scanning lenses were developed to accommodate large input beam diameters ranging from 17mm to 10mm. Thanks to the larger input beam design and shorter UV wavelength, the spot sizes achieved are 1.0 microns, 2.5 microns, and 5 microns respectively. All Special Optics lens designs are diffraction limited and deviation of the telecentricity is less than 0.9%.

Features
  • Diffraction-limited design
  • Precision Manufacture and Assembly
  • Air-Spaced Design
  • Achromatic Designs Available
Model Description
55-S50-20UV-λ Precision Telecentric F-Theta Scanning Lenses for UV Laser Applications
Specs & Docs
Specifications
Back Working Distance (mm) 15
Deflection (degrees) 12
Effective Focal Length (mm) 50
Forward Working Distance (mm) 23
Max Input Beam (mm) 10
Scan Field (mm) 20
Spot Size (microns) 2.5
Wavelength (nm) 266 or 355
55-S100-55UV-λ Precision Telecentric F-Theta Scanning Lenses for UV Laser Applications
Specs & Docs
Specifications
Back Working Distance (mm) 135
Deflection (degrees) 16
Effective Focal Length (mm) 100
Forward Working Distance (mm) 28
Max Input Beam (mm) 10
Scan Field (mm) 55
Spot Size (microns) 5.0
Wavelength (nm) 266 or 355
55-S100-28T@355 8.0X SO Microscope Objective, 0.62 NA
Specs & Docs
Specifications
Back Working Distance (mm) 136
Effective Focal Length (mm) 100
Forward Working Distance (mm) 55
Max Input Beam (mm) 10
Scan Field (mm) 28
Spot Size (microns) 5
Wavelength (nm) 355
55-S34-9UV-λ Precision Telecentric F-Theta Scanning Lenses for UV Laser Applications
Specs & Docs
Specifications
Back Working Distance (mm) 10
Deflection (degrees) 7
Effective Focal Length (mm) 34
Forward Working Distance (mm) 17
Max Input Beam (mm) 17
Scan Field (mm) 9
Spot Size (microns) 1.0
Wavelength (nm) 266 or 355
55-S100-45UV-λ Precision Telecentric F-Theta Scanning Lenses for UV Laser Applications
Specs & Docs
Specifications
Back Working Distance (mm) 150
Deflection (degrees) 16
Effective Focal Length (mm) 100
Forward Working Distance (mm) 28
Max Input Beam (mm) 10
Scan Field (mm) 45
Spot Size (microns) 5.0
Wavelength (nm) 355
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